The Laboratory of Information Optics and Optoelectronic Technology is targeted at the frontier of information optics and applied optics, ranging from fundamental to applied researches, which are supported by National Science and Technology Major Projects. The research areas include advanced lithography techniques, nanometer-accuracy optical measurement technology, optical biosensing technology, diffractive optics and gratings and their applications.

 

　  1. Sensitivity contours of even aberrations for lithographic projection system

 

 

　  2. Experiment of micro-nano information processing with femtosecond laser

　  3. Optical biosensors

　  4. Profiler for optical fiber connector endface

 

5. Nanometer-accuracy interferometer for vibration measurements of laser-driven objects