On October 8th, Dr. Frank Wyrowski from Friedrich-Schiller-University at Jena in Germany paid an academic visit to SIOM.

Dr. Frank Wyrowski visited the Laboratory for Information Optics and Optoelectronic technologyof SIOM and had hot academic discussions with Dr. Huijie Huang and the other researchers in the laboratory. Both sides discussed the entire optical system modeling and simulation of high NA polarization lithography illumination system. After the meeting, Dr. Frank Wyrowski gave a presentation entitled by “Optical modeling beyond ray tracing” to discuss field tracing simulation method used in combined and complex optical system.

Dr. Frank Wyrowski is head of optical engineering in Friedrich-Schiller-University at Jena from 1996. His current research field is optical system simulation based on field tracing, which can be used for combined optical system simulation including diffractive optical element, micro lens array, normal optical lenses and so on. Field tracing will be an effective approach for high NA lithography illumination system modeling and simulation.